TOP > Microfabrication for Super Precision

Etching(Crystal)

Etching is a technology for processing materials by using the corrosive action of chemicals, etc.
Combining it with photolithography technology enables the formation of a large number of tuning fork or AT-cut crystal units that are compact and have good external dimension accuracy, from crystal blank plate in a batch.This combination can also be used for thickness adjustment to adjust the frequency of AT-cut crystal blanks.

Along with the increasing miniaturization of electronic devices, crystal units are also being made increasingly compact, and this is an essential technology for realizing the small-scale, high-accuracy processing that is difficult to achieve by machining.

  • 【Fundamental technology】
  • Wet process
  • Dry process
Detail of crystal

Photolithography

We can handle everything from the super-fine patterns used in semiconductor processes to photolithography, which uses a printed circuit board manufacturing process and is suited to low-cost, large-volume production.

Detail of crystal

MEMS

We can handle everything from the super-fine patterns used in semiconductor processes to photolithography, which uses a printed circuit board manufacturing process and is suited to low-cost, large-volume production.

  • 【Fundamental technology】
  • - Design / Simulation
  • - Thin film (metal film, oxide film, polyimide film)
  • - Photolithography
  • - Wet etching / Dry etching
  • - Micro blast
  • - Junction
  • - Blade dicing / laser dicing
Detail of Ceramic
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